This book deals with an important basic technology in microelectronics. It discusses silicon oxidation in a tutorial fashion from both experimental and theoretical viewpoints. The authors report on the state of the art both at Lucent Technology and in academic research. The book will appeal to researchers and advanced students.
| Author: Yves J. Chabal |
| Publisher: Springer |
| Publication Date: Apr 24, 2001 |
| Number of Pages: 262 pages |
| Binding: Hardback or Cased Book |
| ISBN-10: 354041682X |
| ISBN-13: 9783540416821 |
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