Springer
Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology
Product Code:
9783540539544
ISBN13:
9783540539544
Condition:
New
$61.47
Lpcvd Silicon Nitride and Oxynitride Films: Material and Applications in Integrated Circuit Technology
$61.47
This volume, based on work done in an ESPRIT project, gives a broad overview of the chemical and physical characteristics of silicon oxynitrides, emphasizing how they influence the electrical behavior of this material, which is important for integrated circuit technology.
| Author: F. H. P. M. Habraken |
| Publisher: Springer |
| Publication Date: May 28, 1991 |
| Number of Pages: 159 pages |
| Binding: Paperback or Softback |
| ISBN-10: 3540539549 |
| ISBN-13: 9783540539544 |
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