This book is the most comprehensive book on ion sources as part of ion implantation technology, a newly established basic technology for microelectronic device processing. It appeals to physicists, engineers and advanced students active in ion implantation and ion beam physics.
| Author: Huashun Zhang |
| Publisher: Springer |
| Publication Date: Nov 08, 1999 |
| Number of Pages: 476 pages |
| Binding: Hardback or Cased Book |
| ISBN-10: 3540657479 |
| ISBN-13: 9783540657477 |
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