This book presents a microtechnology important for manufacturing, design and application of microdevices. It appeals to engineers and advanced students.
| Author: M. Elwenspoek |
| Publisher: Springer |
| Publication Date: Nov 27, 2000 |
| Number of Pages: 295 pages |
| Binding: Hardback or Cased Book |
| ISBN-10: 3540675825 |
| ISBN-13: 9783540675822 |