This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
| Author: Raja Nassar |
| Publisher: Springer |
| Publication Date: Dec 08, 2010 |
| Number of Pages: 270 pages |
| Binding: Paperback or Softback |
| ISBN-10: 3642055362 |
| ISBN-13: 9783642055362 |
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