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Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications

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Product Code: 9783662311042
ISBN13: 9783662311042
Condition: New
$61.47

Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications

$61.47
 
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.


Author: Rainer Behrisch
Publisher: Springer
Publication Date: Aug 23, 2014
Number of Pages: 415 pages
Binding: Paperback or Softback
ISBN-10: 3662311046
ISBN-13: 9783662311042
 

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