Springer
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
Product Code:
9783662311042
ISBN13:
9783662311042
Condition:
New
$61.47
Sputtering by Particle Bombardment III: Characteristics of Sputtered Particles, Technical Applications
$61.47
Sputtering, the ejection of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This final volume in a three-part review of sputtering deals with the characterization of the sputtered particles and applications of the technique. It will be of interest to researchers in universities and in industry.
| Author: Rainer Behrisch |
| Publisher: Springer |
| Publication Date: Aug 23, 2014 |
| Number of Pages: 415 pages |
| Binding: Paperback or Softback |
| ISBN-10: 3662311046 |
| ISBN-13: 9783662311042 |