Micro and Nano Fabrication: Tools and Processes
| Author: Hans H. Gatzen |
| Publisher: Springer |
| Publication Date: Jan 20, 2015 |
| Number of Pages: 519 pages |
| Binding: Hardback or Cased Book |
| ISBN-10: 3662443945 |
| ISBN-13: 9783662443941 |
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