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Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
Audience: Coverage ranges from introductory to state of the art, thus the book is suitable for graduate-level students seeking an introduction to the field as well as established workers wishing to broaden or update their knowledge.
| Author: P. F. Williams |
| Publisher: Springer |
| Publication Date: 41194 |
| Number of Pages: 613 pages |
| Binding: Technology & Engineering |
| ISBN-10: 9401064865 |
| ISBN-13: 9789401064866 |
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