Intechopen
Micro Electronic and Mechanical Systems
Product Code:
9789533070278
ISBN13:
9789533070278
Condition:
New
$205.00
$181.31
Sale 12%
Micro Electronic and Mechanical Systems
$205.00
$181.31
Sale 12%
This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.
| Author: Kenichi Takahata |
| Publisher: Intechopen |
| Publication Date: 40148 |
| Number of Pages: 528 pages |
| Binding: Technology & Engineering |
| ISBN-10: 9533070277 |
| ISBN-13: 9789533070278 |
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