Introduction to Focused Ion Beams: Instrumentation, Theory, Techniques and Practice

Introduction to Focused Ion Beams is geared towards techniques and applications. The first portion of this book introduces the basics of FIB instrumentation, milling, and deposition capabilities. The chapter dedicated to ion-solid interactions is presented so that the FIB user can understand which parameters will influence FIB milling behavior. The remainder of the book focuses on how to prepare and analyze samples using FIB and related tools, and presents specific applications and techniques of the uses of FIB milling, deposition, and dual platform techniques. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and Dual platform instruments