Springer
Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact
Product Code:
9783319939247
ISBN13:
9783319939247
Condition:
New
$211.47
Metal Impurities in Silicon- And Germanium-Based Technologies: Origin, Characterization, Control, and Device Impact
$211.47
This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices' performance. Several control and possible gettering approaches are addressed. The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.
| Author: Cor Claeys |
| Publisher: Springer |
| Publication Date: Aug 22, 2018 |
| Number of Pages: 438 pages |
| Binding: Hardback or Cased Book |
| ISBN-10: 3319939246 |
| ISBN-13: 9783319939247 |
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