This up-to-date monograph provides a thorough review of the relevant data and properties of the transition-metal impurities generated during silicon-sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey is given of their impact on device performance. The specific properties of the main and rare impurities in silicon are examined, as well as the detection methods and requirements in modern technology. This new edition includes important recent data and many new tables.
| Author: Klaus Graff |
| Publisher: Springer |
| Publication Date: Feb 18, 2000 |
| Number of Pages: 270 pages |
| Binding: Hardback or Cased Book |
| ISBN-10: 3540642137 |
| ISBN-13: 9783540642138 |
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